CHARGED PARTICLE DETECTION USING A MICROMECHANICAL ELECTROMETER | Zendy

G. Jaramillo | Zendy; M. Li | Zendy; Cesare Buffa | Zendy; Fred J. Brechtel | Zendy; David A. Horsley | Zendy

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CHARGED PARTICLE DETECTION USING A MICROMECHANICAL ELECTROMETER

Author(s) -

G. Jaramillo,

M. Li,

Cesare Buffa,

Fred J. Brechtel,

David A. Horsley

Publication year - 2012

Publication title -

1998 solid-state, actuators, and microsystems workshop technical digest

Language(s) - English

Resource type - Conference proceedings

DOI - 10.31438/trf.hh2012.79

Subject(s) - electrometer , microelectromechanical systems , particle (ecology) , faraday cup , electrode , noise (video) , physics , optics , optoelectronics , materials science , oceanography , quantum mechanics , computer science , geology , beam (structure) , artificial intelligence , ion beam , image (mathematics)

We have developed a MEMS-based electrometer for the detection of small currents from ionized particles in an aerosol particle detection system. We utilize a porous sensing-electrode coupled to a MEMS resonating electrometer. Our electrometer achieved a noise floor below 1 fA rms produced by 10 nm diameter particles within an airflow of 1.0 L/min. At this flow rate, the minimum detectable current (1 fA) corresponds to a minimum measurable particle density of 400 cm. We compared and calibrated the MEMS electrometer with two commercial units: a Faraday cup electrometer and a MCPC (Mixing Condensation Particle Counter). The MEMS electrometer achieved an experimental sensitivity of 19.68 Vrms/fA and charge-detection efficiency of 5.476 X 10 V/C.

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