Open AccessALUMINUM NITRIDE PIEZOELECTRIC MICROMACHINED ULTRASOUND TRANSDUCER ARRAYS
Author(s) -
Stefon E. Shelton,
Andre F. S. Guedes,
Richard J. Przybyla,
R. Krigel,
Bernhard E. Boser,
David A. Horsley
Publication year - 2012
Publication title -
1998 solid-state, actuators, and microsystems workshop technical digest
Language(s) - English
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2012.78
Subject(s) - transducer , materials science , piezoelectricity , pmut , capacitive micromachined ultrasonic transducers , fabrication , nitride , acoustics , bandwidth (computing) , electromechanical coupling coefficient , ultrasonic sensor , optoelectronics , layer (electronics) , computer science , nanotechnology , composite material , telecommunications , medicine , physics , alternative medicine , pathology
Air-coupled piezoelectric micromachined ultrasound transducer arrays, operating at ~190 kHz, have been fabricated utilizing an aluminum nitride piezoelectric layer. Improved fabrication processes have reduced the frequency variation seen in our previous work with single transducers resulting in arrays of transducers with resonant frequencies (fn) that match within the fractional half-power bandwidth, 1/Q = 6.6%, of the transducer. Matching of ∆f/f < 2% has been achieved across a 20 element 2-D array.
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