PARAMETER SWEEP STRATEGIES FOR SENSING USING BIFURCATIONS IN MEMS | Zendy

Christopher Burgner | Zendy; Nicholas J. Miller | Zendy; Steven W. Shaw | Zendy; Kimberly L. Turner | Zendy

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PARAMETER SWEEP STRATEGIES FOR SENSING USING BIFURCATIONS IN MEMS

Author(s) -

Christopher Burgner,

Nicholas J. Miller,

Steven W. Shaw,

Kimberly L. Turner

Publication year - 2010

Publication title -

1998 solid-state, actuators, and microsystems workshop technical digest

Language(s) - English

Resource type - Conference proceedings

DOI - 10.31438/trf.hh2010.36

Subject(s) - resonator , control theory (sociology) , microelectromechanical systems , bifurcation , noise (video) , jump , sensitivity (control systems) , bifurcation theory , work (physics) , point (geometry) , computer science , mathematics , physics , electronic engineering , engineering , nonlinear system , optics , artificial intelligence , optoelectronics , control (management) , geometry , quantum mechanics , image (mathematics) , thermodynamics

In this work we consider a sensing strategy using dynamic bifurcations in MEMS resonators. We examine the statistics of jump events that occur as a result of a linear parameter sweep through a subcritical pitchfork bifurcation in a parametrically driven MEMS resonator in the presence of noise. The statistics of jump events are compared to those derived from a simple onedimensional model and are found to have good agreement. Issues related to how system and input parameters affect these statistics are described, and sweeping strategies that lead to precise, fast estimates of the bifurcation point, as essential for these sensors, are derived. It is shown that for a typical MEMS resonator an optimal sweep rate exists, and noise may need to be added to achieve optimal sensitivity.

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