DEVELOPMENT OF HIGH-PERFORMANCE, HIGH-VOLUME CONSUMER MEMS GYROSCOPES
Author(s) -
J.I. Seeger,
Mayasari Lim,
Sayyad Nasiri
Publication year - 2010
Publication title -
1998 solid-state, actuators, and microsystems workshop technical digest
Language(s) - English
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2010.16
Subject(s) - gyroscope , microelectromechanical systems , consumer market , electronics , computer science , volume (thermodynamics) , embedded system , engineering , electrical engineering , systems engineering , aerospace engineering , nanotechnology , materials science , business , physics , marketing , quantum mechanics
This paper discusses the challenges and success factors for creating the world’s first integrated MEMS gyroscopes for the consumer electronics market. A disruptive MEMS processing platform called Nasiri-Fabrication is described which has enabled Motion Processing applications, creating the largest and fastest growing MEMS sensors market segment. The paper also presents the design challenges and methodology behind the creation of the world’s smallest and best performing consumer grade gyroscope.
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