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HIGH-SPEED AXIAL-FLUX PERMANENT MAGNET MICROMOTORS WITH ELECTROPLATED WINDINGS
Author(s) -
Florian Herrault,
Peter R. Galle,
Mark G. Allen
Publication year - 2010
Publication title -
1998 solid-state, actuators, and microsystems workshop technical digest
Language(s) - English
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2010.110
Subject(s) - electromagnetic coil , magnet , materials science , stator , electroplating , rotor (electric) , fabrication , microfabrication , electrical engineering , magnetic flux , mechanical engineering , nuclear magnetic resonance , optoelectronics , layer (electronics) , composite material , engineering , magnetic field , physics , quantum mechanics , medicine , alternative medicine , pathology
This paper reports the design and microfabrication of electroplated multi-phase stator windings and their use in a high-speed permanent magnet micromotor. As the stator windings of an axialflux micromotor, both single-plated folded coils, and two-layer double-plated interleaved coils are demonstrated. These stators, combined with a 10 mm-diameter permanent magnet rotor and an all-CMOS drive circuit, enabled speeds in excess of 50,000 RPM and 200,000 RPM, respectively, establishing a trade-off between performance and fabrication simplicity. At these speeds, the dissipated power in the microfabricated coils was approximately 1.81 W and 1.80 W for the folded and double-plated coils, respectively.

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