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This paper presents noise analysis of a lateral tunneling accelerometer, considering Brownian motion, Nyquist-Johnson and shot noise. The tunneling accelerometer has been fabricated; a low noise differential transresistance amplifier and a digital integral controller have been designed and implemented. Noise analysis has been made based on state space models and compared with experimental results.

NOISE ANALYSIS OF A TUNNELING ACCELEROMETER BASED ON STATE SPACE STOCHASTIC THEORY