Open AccessDESIGN OF ELECTROSTATICALLY ACTUATED MEMS UNDER UNCERTAINTIES
Author(s) -
Nitin Agarwal,
N. R. Aluru
Publication year - 2008
Publication title -
1998 solid-state, actuators, and microsystems workshop technical digest
Language(s) - Uncategorized
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2008.45
Subject(s) - microelectromechanical systems , computer science , monte carlo method , collocation (remote sensing) , electronic engineering , work (physics) , mechanical engineering , engineering , materials science , mathematics , nanotechnology , statistics , machine learning
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