INTERNAL ELECTROSTATIC TRANSDUCTION FOR BULK-MODE MEMS RESONATORS | Zendy

Sunil A. Bhave | Zendy; Roger T. Howe | Zendy

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INTERNAL ELECTROSTATIC TRANSDUCTION FOR BULK-MODE MEMS RESONATORS

Author(s) -

Sunil A. Bhave,

Roger T. Howe

Publication year - 2004

Publication title -

1998 solid-state, actuators, and microsystems workshop technical digest

Language(s) - English

Resource type - Conference proceedings

DOI - 10.31438/trf.hh2004.15

Subject(s) - resonator , materials science , electrode , microelectromechanical systems , dielectric , transduction (biophysics) , electrostatics , optoelectronics , air gap (plumbing) , physics , chemistry , composite material , biochemistry , quantum mechanics

This paper demonstrates a new approach to electrostatic drive and detection of bulk acoustic resonators in which the electrode-gaps are filled with a high dielectric constant material. Internal electrostatic transduction has much higher efficiency than air-gap electrostatic transduction for bulk-mode resonators, which results in improved electrical performance. As a proof-of-concept, we demonstrate this phenomenon by electrostatic actuation of a 1.9GHz AlN (N ~ 9) film bulk acoustic resonator (FBAR).

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