Parallel-Plate Driven Oscillations and Resonant Pull-In | Zendy

J.I. Seeger | Zendy; B.E. Boser | Zendy

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Parallel-Plate Driven Oscillations and Resonant Pull-In

Author(s) -

J.I. Seeger,

B.E. Boser

Publication year - 2002

Publication title -

1998 solid-state, actuators, and microsystems workshop technical digest

Language(s) - English

Resource type - Conference proceedings

DOI - 10.31438/trf.hh2002.78

Subject(s) - actuator , resonance (particle physics) , amplitude , limit (mathematics) , work (physics) , physics , spring (device) , acoustics , steady state (chemistry) , frequency response , mechanics , function (biology) , control theory (sociology) , optics , computer science , engineering , electrical engineering , mathematical analysis , atomic physics , mathematics , quantum mechanics , chemistry , control (management) , evolutionary biology , artificial intelligence , biology , thermodynamics

This work characterizes parallel-plate actuators for oscillations near the mechanical resonant frequency and amplitudes comparable to the actuator gap. Specifically, we show that at resonance, the structure can move beyond the well-known pull-in-limit but is instead limited to 56% of the gap by “resonant pull-in.” Above the resonant frequency, the structure is not limited by pull-in and can theoretically oscillate across the entire gap. We develop a describing function model, which includes an amplitudedependent model for electrostatic spring tuning, to predict the steady-state frequency response. These results are verified experimentally.

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