A Flat High-Frequency Scanning Micromirror | Zendy

Robert A. Conant | Zendy; Julia Nee | Zendy; K.Y. Lau | Zendy; R.S. Muller | Zendy

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A Flat High-Frequency Scanning Micromirror

Author(s) -

Robert A. Conant,

Julia Nee,

K.Y. Lau,

R.S. Muller

Publication year - 2000

Publication title -

1998 solid-state, actuators, and microsystems workshop technical digest

Language(s) - English

Resource type - Conference proceedings

DOI - 10.31438/trf.hh2000.2

Subject(s) - optics , pixel , materials science , fabrication , actuator , diffraction , wavelength , resolution (logic) , image resolution , dot pitch , optoelectronics , physics , computer science , medicine , alternative medicine , pathology , artificial intelligence

We present the Staggered Torsional Electrostatic Combdrive (STEC) fabrication process that creates thick mirrors with hightorque actuators, thereby allowing high-speed optical scanning with large angular deflections. We have demonstrated a 550 μmdiameter mirror capable of scanning an optical angle of 24.9° at its 34 kHz resonant frequency with less than 30 nm static and dynamic deformation. The optical resolution is 350 pixels – very near the diffraction-limited resolution of 355 pixels with 655 nm wavelength light.

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