Investigation of CdSb surfaces after different processing methods
Author(s) -
S.G. DREMLYUZHENKO
Publication year - 2010
Publication title -
chemistry of metals and alloys
Language(s) - English
Resource type - Journals
eISSN - 1998-8087
pISSN - 1998-8079
DOI - 10.30970/cma3.0109
Subject(s) - polishing , auger electron spectroscopy , oxide , stoichiometry , layer (electronics) , chemical mechanical planarization , materials science , surface layer , analytical chemistry (journal) , chemistry , nanotechnology , composite material , metallurgy , chromatography , physics , nuclear physics
The effect of different processing methods on the surface of CdSb crystals has been studied. Studies by the electron Auger-spectroscopy method have shown the presence of etchant components in the near-surface oxide layer. Chemical-mechanical polishing with an alkaline solution of colloidal silica allows obtaining an oxide layer of minimum thickness and a contaminated surface of close to stoichiometric composition.
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