High NA diffractive array illuminators and application in a multi-spot scanning microscope
Author(s) -
Bas Hulsken,
Dirk L. J. Vossen,
Sjoerd Stallinga
Publication year - 2012
Publication title -
journal of the european optical society rapid publications
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.357
H-Index - 33
ISSN - 1990-2573
DOI - 10.2971/jeos.2012.12026
Subject(s) - microscope , optics , spots , resolution (logic) , high resolution , sample (material) , materials science , physics , computer science , remote sensing , artificial intelligence , chemistry , geology , thermodynamics
Array illuminators generating spots with high NA at high efficiency are presented. They are designed via application of high-NA scalar optics methods, and implemented as periodic binary phase structures. These array illuminators are used in a multi-spot scanning microscope for scanning large sample areas with a relatively high resolution
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