Femtosecond Laser Drilling of Copper: Modeling and Experiment Comparison
Author(s) -
Yi-Hsien Liu,
Chung-Wei Cheng,
Jinn-Kuen Chen,
S Nolte,
C Momma,
H Jacobs,
A Tunnermann,
B Chichkov,
B Wellegehausen,
H Welling,
R Gattass,
E Mazur,
J Yang,
Y Zhao,
X Zhu,
J Byskov-Nielsen,
J.-M Savolainen,
M Christensen,
P Balling,
B Wu,
Y Shin,
M Hashida,
A Semerok,
O Gobert,
G Petite,
Y Izawa,
J Wagner,
J Byskov-Nielsen,
J Savolainen,
M Christensen,
P Balling,
Y Miyasaka,
M Hashida,
T Nishii,
S Inoue,
S Sakabe,
R Harzic,
D Breitling,
M Weikert,
S Sommer,
C Fohl,
S Valette,
C Donnet,
E Audouard,
F Dausinger,
R Harzic,
D Breitling,
M Weikert,
S Sommer,
C Fohl,
S Valette,
C Donnet,
E Audouard,
F Dausinger,
J Yang,
Y Zhao,
X Zhu,
A Suslova,
A Elsied,
A Hassanein,
S Li,
S Li,
F Zhang,
D Tian,
H Li,
D Liu,
Y Jiang,
A Chen,
M Jin,
S Wang,
Y Ren,
C Cheng,
J Chen,
D Tzou,
C Cheng,
S Wang,
K Chang,
J Chen,
S Dring,
A Ancona,
S Hdrich,
J Limpert,
S Nolte,
A Tnnermann,
Y Ren,
J Chen,
Y Zhang,
J Winter,
S Rapp,
M Schmidt,
H Huber,
K Vestentoft,
P Balling,
D Fisher,
M Fraenkel,
Z Henis,
E Moshe,
S Eliezer,
J Winter,
S Rapp,
M Schmidt,
H Huber,
A Sandhu,
A Dharmadhikari,
G Kumar,
B Cho,
T Ogitsu,
K Engelhorn,
A Correa,
Y Ping,
J Lee,
L Bae,
D Prendergast,
R Falcone,
P Heimann,
S Anisimov,
B Kapeliovich,
T Perel'man,
J Chen,
J Beraun,
V Schmidt,
W Husinsky,
G Betz,
K Yoo,
X Zhao,
M Siddique,
R Alfano,
D Osterman,
M Radparvar,
J Cunniff,
D Willis,
X Xu,
R Kelly,
A Miotello,
J Huang,
Y Zhang,
J Chen,
Y Ren,
J Chen,
Y Zhang,
Y Ren,
J Chen,
Y Zhang,
E Gurevich,
W Hu,
Y Shin,
G King
Publication year - 2020
Publication title -
journal of laser micro/nanoengineering
Language(s) - English
Resource type - Journals
ISSN - 1880-0688
DOI - 10.2961/jlmn.2020.01.2005
Subject(s) - femtosecond , materials science , copper , laser drilling , drilling , laser , optics , metallurgy , physics
This study experimentally and theoretically investigated the ablation of copper by a femtosecond green laser pulse of wavelength 515 nm and pulse duration 300 fs. The copper was processed by a single laser pulse with fluences up to 789 J/cm2. A modified Drude-critical point (DCP) model that considers the temperature-dependent inter-band transition, a two-temperature model (TTM), two phase change models, and a phase explosion model were adopted to obtain the temperature-dependent properties and ablation depth. The simulated ablation depths by the proposed DCP-mod method were in better agreement with the experimental results than those by the conventional DCP model.
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