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* Laser Zentrum Hannover e.V., Hollerithallee 8, 30419 Hannover, Germany E-mail: v.schuetz@lzh.de ** Japan Aerospace Exploration Agency (JAXA) Institute of Space and Astronautical Science (ISAS), Rm1624, 3-1-1 Yoshinodai, Chuo, Sagamihara, Kanagawa 252-5210, Japan *** School of Physics and Astronomy and Minnesota Institute for Astrophysics, University of Minnesota/Twin Cities, 116 Church St. SE Minneapolis, MN 55455, USA

Laser Processing of Sub-Wavelength Structures on Sapphire and Alumi-na for Millimeter Wavelength Broadband Anti-Reflection Coatings