Investigation of Thermochemical Reaction of Metallic Grooves Manufactured with Laser Micromachining in Liquid
Author(s) -
Kwang Hwan Oh
Publication year - 2016
Publication title -
journal of laser micro/nanoengineering
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.377
H-Index - 26
ISSN - 1880-0688
DOI - 10.2961/jlmn.2016.01.0005
Subject(s) - etching (microfabrication) , groove (engineering) , materials science , phosphoric acid , isotropic etching , metal , laser , x ray photoelectron spectroscopy , irradiation , chemical reaction , surface micromachining , absorption (acoustics) , analytical chemistry (journal) , metallurgy , composite material , chemical engineering , layer (electronics) , chemistry , optics , chromatography , fabrication , biochemistry , pathology , medicine , physics , nuclear physics , alternative medicine , engineering
Chemical reaction governing the overall etching process is the most significant factor in the determination of etching characteristics in laser-induced etching. A method of the sample preparation for measuring chemistry of the etchant and etched metallic groove is demonstrated. Also, chemical analyses of the used etchant and etched groove and derivation of the possible reactions between the stainless steel 304 workpiece and phosphoric acid during laser irradiation and non-irradiation are carried out based on the measured data of XPS, UV-VIS absorption, and ICP-mass, respectively in this paper.
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