High Speed Laser Micro Processing Using High Brilliance Continuous Wave Laser Radiation
Author(s) -
Horst Exner
Publication year - 2012
Publication title -
journal of laser micro/nanoengineering
Language(s) - English
Resource type - Journals
ISSN - 1880-0688
DOI - 10.2961/jlmn.2012.01.0023
Subject(s) - laser , galvanometer , optics , materials science , laser power scaling , x ray laser , laser linewidth , continuous wave , beam parameter product , fiber laser , nanosecond , optoelectronics , laser beam quality , laser beams , physics
Laser micro processing using a high power single-mode continuous wave fibre laser in combina-tion with a fast galvanometer scanner as well as an ultra fast polygon scan systems was investigated. As a key technology in high rate laser ablation a maximum laser power up to 3 kW and scan speeds up to 18,000 m/minwere applied. With the ultra fast laser beam deflection and laser a smallfocal spot diameter of 21 µm laser dwell times less than 100 nanoseconds were achieved. As a result laser intensities comparable to the q-switched lasers in the range of
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