Open AccessTemperature dependence of composition in Ta-Zr-N thin film Deposited by Magnetron Sputtering
Author(s) -
R. Hariharan
Publication year - 2019
Publication title -
journal of mechanics of continua and mathematical sciences
Language(s) - English
Resource type - Journals
eISSN - 2454-7190
pISSN - 0973-8975
DOI - 10.26782/jmcms.spl.2019.08.00082
Subject(s) - materials science , sputter deposition , sputtering , thin film , cavity magnetron , composition (language) , analytical chemistry (journal) , chemistry , nanotechnology , art , environmental chemistry , literature
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