Open AccessAmorphous Metal Tungsten Nitride and its Application for Micro and Nanoelectromechanical Applications
Author(s) -
Abdulilah Mohammad Mayet
Publication year - 2016
Publication title -
king abdullah university of science and technology repository (king abdullah university of science and technology)
Language(s) - English
Resource type - Dissertations/theses
DOI - 10.25781/kaust-6143o
Subject(s) - tungsten , nitride , materials science , amorphous solid , nanotechnology , nanoelectromechanical systems , metal , optoelectronics , metallurgy , nanoparticle , chemistry , crystallography , layer (electronics) , nanomedicine
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