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Modern electronic technologies allow for the design and production of Micro Electro-Mechanical Systems, also called MEMS. These microchips are widely used as sensors in many fields of application, also in embedded systems in heavy-duty and agricultural vehicles and in automotive applications. In addition to the classic uses of these sensors, new architectures and sensor topologies exploit electromechanical principles of great interest for the field of hydraulic applications. This paper presents some examples of the application of a new MEMS architecture based on self-oscillating microresonators, which offer interesting capabilities in the measurement of mechanical deformation of mechanical components. MEMS are applied as non-invasive pressure and oil flow sensors, and represent an interesting option for creating smart components. All the applications described are intended to show the sensor potential and have a qualitative and exemplary character, but they can provide a basis for in-depth studies on the potential and applicability of these sensors.

Mems sensors in hydraulics, an opportunity to create smart components