ANALYTICAL OPTIMIZATION OF HIGH PERFORMANCE AND HIGH QUALITY FACTOR MEMS SPIRAL INDUCTOR | Zendy

Parsa Pirouznia | Zendy; Bahram Azizollah Ganji | Zendy

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ANALYTICAL OPTIMIZATION OF HIGH PERFORMANCE AND HIGH QUALITY FACTOR MEMS SPIRAL INDUCTOR

Author(s) -

Parsa Pirouznia,

Bahram Azizollah Ganji

Publication year - 2014

Publication title -

progress in electromagnetics research m

Language(s) - English

Resource type - Journals

SCImago Journal Rank - 0.216

H-Index - 31

ISSN - 1937-8726

DOI - 10.2528/pierm13121908

Subject(s) - spiral (railway) , microelectromechanical systems , inductor , quality (philosophy) , materials science , q factor , optoelectronics , electrical engineering , physics , mechanical engineering , engineering , quantum mechanics , voltage , resonator

In this paper, design and simulation of optimized MEMS spiral inductor are presented. The efiects of design parameters on characteristics of inductor have been considered. The suspended spiral inductor was designed on silicon substrate using MEMS technology to reduce the metal and substrate losses of inductor. The results show that the quality factor of the inductor is 27 at 5.23GHz and that the maximum Q-factor is 42 at 26.56GHz. The dimension of the inductor is 185 £ 200"m 2 , which occupies less area on chip than other works. In this work, the high quality factor inductor with small size is obtained.

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