ELECTRIC EQUIVALENT CIRCUIT FOR THE THICKENED EDGE LOAD SOLUTION IN A BULK ACOUSTIC WAVE RESONATOR | Zendy

Jordi Verdú | Zendy; Pedro de Paco | Zendy; Óscar Menéndez | Zendy

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ELECTRIC EQUIVALENT CIRCUIT FOR THE THICKENED EDGE LOAD SOLUTION IN A BULK ACOUSTIC WAVE RESONATOR

Author(s) -

Jordi Verdú,

Pedro de Paco,

Óscar Menéndez

Publication year - 2010

Publication title -

progress in electromagnetics research m

Language(s) - English

Resource type - Journals

SCImago Journal Rank - 0.216

H-Index - 31

ISSN - 1937-8726

DOI - 10.2528/pierm09121104

Subject(s) - resonator , acoustics , enhanced data rates for gsm evolution , equivalent circuit , materials science , physics , computer science , optoelectronics , telecommunications , voltage , quantum mechanics

With the aim to improve the performance of Bulk Acoustic Wave resonators, the thickened edge load can be included on the top electrode. Using this solution, the energy trapping concept is forced, and lateral unwanted resonances are not present in the electrical behavior of the resonator. The way to design such a thickened edge load entails, on one hand, the presence of a resonant mode given by the thickened edge load; on the other hand, the degradation of the electromechanical coupling coefficient of the main thickness mode. In order to study the previous phenomena, the electric equivalent circuit has been developed. The obtained results have been validated with the three-dimensional simulations and compared with manufactured resonators.

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