STANDING WAVE EFFECTS IN MICROWAVE ELLIPSOMETRY | Zendy

Lawrence R. Lawson | Zendy; Hashim A. Yousif | Zendy

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STANDING WAVE EFFECTS IN MICROWAVE ELLIPSOMETRY

Author(s) -

Lawrence R. Lawson,

Hashim A. Yousif

Publication year - 2010

Publication title -

progress in electromagnetics research letters

Language(s) - English

Resource type - Journals

SCImago Journal Rank - 0.245

H-Index - 33

ISSN - 1937-6480

DOI - 10.2528/pierl10012905

Subject(s) - ellipsometry , microwave , materials science , optoelectronics , optics , physics , computer science , nanotechnology , telecommunications , thin film

Unlike ellipsometry using light, ellipsometry using microwaves can be subject to significant standing wave effects resulting from reflection of the received wave back to the source. This paper examines these effects on the apparent homogeneity of circular polarization. These effects are examined experimentally using an ellipsometer with no sample and compared with calculated results for a single order of reflection. Good agreement is obtained. That the peakto-peak variations in the observed irradiance are on the order of four times the amplitude reflectance is observed. The angular dependencies of these effects are path length dependent.

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