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The paper presents the detailed analysis of the intercon- nect capacitance, crosstalk time and peak crosstalk voltage. The de- pendency of the couple capacitance and fringe capacitance on the in- terconnect layer dimensions affects significantly to the interconnect ca- pacitance. The peak crosstalk time obtained to be 13 femtoseconds for 9.6 femtoseconds of propagation delay, while the maximum crosstalk voltage obtained to be 178 mV.

ANALYSIS OF CAPACITANCE ACROSS INTERCONNECTS OF LOW-K DIELECTRIC USED IN A DEEP SUB-MICRON CMOS TECHNOLOGY