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This paper investigates the design of a small antenna on a silicon substrate. The antenna on silicon substrate will be used for integration in a silicon-based GaN TR module. This Co-Planar Waveguide (CPW)-fed antenna has been successfully miniaturized up to λ/4 about 20% reductions by adding a slot to the patch antenna. Promising results are obtained from the antenna simulation and measurement. From the measurement result, the antenna bandwidth is 45% (4.8 GHz–7.5 GHz) with measured gain about 2.5 dBi over frequency range of 5 GHz–7.4 GHz.

SILICON CPW FED SLOTTED ANTENNA FOR REALIZATION OF INTEGRATED SAR SYSTEM FRONT-END