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The strip-line frequency-domain technique for permeabil- ity measurement is compared to the fleld domain technique. The com- bined setup for microwave measurement of thin fllm permeability with both techniques is proposed. The fleld-domain technique is less afiected by inhomogeneity of measurement strip cell and has signiflcantly higher signal-to-noise ratio, but the obtained parameters are afiected by fllm thickness and may difier from that of the frequency-domain technique. Analysis of the fleld-domain data obtained at a set of frequencies makes it possible to determine the saturation magnetisation, the anisotropy fleld and the damping factor without the knowledge of the amount of substance under study. In case of a simple permeability spectrum the data on metal thickness make it possible to estimate the efiective skin-depth as well. The technique is tested by simulation and is ap- plied to determine permeability of Fe-based fllms vacuum-sputtered on glassceramic and polymer substrates.

THE STUDY OF STRUCTURE-DEPENDENT PROPERTIES OF THIN MAGNETIC FILMS AT MICROWAVES BY FIELD-DOMAIN RESONANCE TECHNIQUE