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In this paper, two difierent kinds of near-fleld measure- ment techniques are presented. The flrst one uses coaxial probes that do not give precise measurements on microelectronic devices. We saw in (1) that the spatial resolution of these probes reaches 500"m for monopole and is millimetric for dipole probe. The second one is based on the Pockels efiect that converts an electromagnetic (EM) fleld into optical modulation. Our objective is to improve the Ex=Ey near-fleld measurement with this second technique. The performance of the electro-optic (EO) probe is compared with dipole probes of 2.5 and 5mm with the use of simulations and measurements, on a wire above a ground plane and on coupled microstrip lines. At the end, a discus- sion about the technical limitations of the EO probe is made.

IMPROVEMENT OF ELECTRICAL NEAR-FIELD MEASUREMENTS WITH AN ELECTRO-OPTIC TEST BENCH