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We have built Fabry-Perot resonators based on microstructured silicon and a liquid crystal. The devices exhibit tuning of the resonance peaks over a wide range, with relative spectral shifts of up to Delta lambda/lambda = 10%. In order to achieve this substantial spectral shift, cavity peaks of high order were used. Under applied voltages of up to 15 V, a variation in the refractive index of the nematic liquid crystal E7 from Delta n(LC) = 0.12 to Delta n(LC) = 0.17 was observed. These results may have practical applications in the near-, mid and far-infrared range

ELECTRICALLY TUNABLE FABRY-PEROT RESONATOR BASED ON MICROSTRUCTURED SI CONTAINING LIQUID CRYSTAL