Open AccessCharacterization and control of laser induced modification inside silicon
Author(s) -
Xinya Wang,
Xiaoming Yu,
Hongyu Shi,
Xianhua Tian,
Maxime Chambonneau,
David Grojo,
B. D. DePaola,
Matthew J. Berg,
Shuting Lei
Publication year - 2019
Publication title -
journal of laser applications
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.549
H-Index - 52
eISSN - 1938-1387
pISSN - 1042-346X
DOI - 10.2351/1.5096086
Subject(s) - wafer dicing , wafer , materials science , silicon , laser , optics , isotropic etching , etching (microfabrication) , surface modification , polishing , hybrid silicon laser , optoelectronics , laser scanning , nanotechnology , composite material , chemistry , physics , layer (electronics)
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