Open AccessTheoretical model for ablation of thick aluminum film on polyimide substrate by laser etching
Author(s) -
Xiaoli Liu,
Yuqing Xiong,
Ni Ren,
Rui Wang,
Gan Wu
Publication year - 2018
Publication title -
journal of laser applications
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.549
H-Index - 52
eISSN - 1938-1387
pISSN - 1042-346X
DOI - 10.2351/1.5054591
Subject(s) - materials science , laser , polyimide , fluence , etching (microfabrication) , laser ablation , optics , aluminium , ablation , laser power scaling , x ray laser , irradiation , laser beam machining , substrate (aquarium) , optoelectronics , composite material , laser beams , layer (electronics) , oceanography , physics , engineering , geology , nuclear physics , aerospace engineering
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