Structure and morphology of nano-sized W-Ti/Si thin films | Zendy

S. Petrović | Zendy; Borivoje Adnadjevic | Zendy; D. Peruško | Zendy; Nada Popović | Zendy; N. Bundaleski | Zendy; M. Radović | Zendy; B. Gaković | Zendy; Z. Rakočević | Zendy

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Structure and morphology of nano-sized W-Ti/Si thin films

Author(s) -

S. Petrović,

Borivoje Adnadjevic,

D. Peruško,

Nada Popović,

N. Bundaleski,

M. Radović,

B. Gaković,

Z. Rakočević

Publication year - 2006

Publication title -

journal of the serbian chemical society

Language(s) - English

Resource type - Journals

SCImago Journal Rank - 0.227

H-Index - 45

eISSN - 1820-7421

pISSN - 0352-5139

DOI - 10.2298/jsc0609969p

Subject(s) - materials science , thin film , crystallite , phase (matter) , grain size , silicon , scattering , surface roughness , surface finish , scanning tunneling microscope , analytical chemistry (journal) , substrate (aquarium) , sputtering , texture (cosmology) , crystallography , nanotechnology , composite material , optics , metallurgy , chemistry , physics , oceanography , image (mathematics) , organic chemistry , chromatography , artificial intelligence , geology , computer science

Thin films were deposited by d.c. sputtering onto a silicon substrate. The influence of the W-Ti thin film thickness to its structural and morphological charac- teristics of a nano-scale were studied. The phase composition and grain size were studied by X-ray diffraction (XRD), while the surface morphology and surface roughness were determined by scanning tunneling microscopy (STM). The analysis of the phase composition show that the thin films had a polycrystalline structure - they were composed of a b.c.c. W phase with the presence of a h.c.p. Ti phase. The XRD peak in the scattering angle interval of 38o-43o was interpreted as an overlap of peaks corresponding to the W(110) and Ti(101) planes. The grain size and the mean surface roughness both increase with the thikness of the thin film. The chemi- cal composition of the thin film surface was also analysed by low energy ions scat- tering (LEIS). The results show the surface segregation of titanium, as well as a sub- stantial presence of oxygen an the surface.

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