Open AccessAdvanced precursor design for atomic layer deposition and chemical vapour deposition of gold metal
Author(s) -
Matthew Bertram Edward Griffiths
Publication year - 2020
Language(s) - English
Resource type - Dissertations/theses
DOI - 10.22215/etd/2020-14311
Subject(s) - quartz crystal microbalance , atomic layer deposition , x ray photoelectron spectroscopy , chemistry , thermogravimetric analysis , differential scanning calorimetry , nanotechnology , materials science , chemical engineering , thin film , organic chemistry , physics , adsorption , engineering , thermodynamics