Open AccessCharacterization of piezoelectric AlN thin films deposited on Si by RF reactive magnetron sputtering at low temperature for acoustic wave devices
Author(s) -
Akhtar Mirfazli
Publication year - 2004
Language(s) - English
Resource type - Dissertations/theses
DOI - 10.22215/etd/2004-05798
Subject(s) - materials science , sputtering , characterization (materials science) , piezoelectricity , optoelectronics , sputter deposition , thin film , radio frequency , composite material , electrical engineering , nanotechnology , engineering
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