Open AccessCharacterization of piezoelectric AlN thin films deposited on Si by RF reactive magnetron sputtering at low temperature for acoustic wave devices
Author(s) -
Akhtar Mirfazli
Publication year - 2018
Language(s) - English
Resource type - Dissertations/theses
DOI - 10.22215/etd/2004-05798
Subject(s) - materials science , piezoelectricity , characterization (materials science) , sputtering , sputter deposition , optoelectronics , thin film , composite material , nanotechnology