Open AccessDevelopment of a-GexSi1-xOy CMOS compatible micromachined infrared detector for thermal imaging applications
Author(s) -
Ahmed Ahmed
Publication year - 2004
Language(s) - English
Resource type - Dissertations/theses
DOI - 10.22215/etd/2004-05762
Subject(s) - cmos , detector , infrared , materials science , thermal , optoelectronics , electronic engineering , electrical engineering , engineering , optics , physics , meteorology
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