Open AccessDevelopment of a-GexSi1-xOy CMOS compatible micromachined infrared detector for thermal imaging applications
Author(s) -
Ahmed Ahmed
Publication year - 2018
Language(s) - English
Resource type - Dissertations/theses
DOI - 10.22215/etd/2004-05762
Subject(s) - cmos , detector , infrared , materials science , thermal , surface micromachining , optoelectronics , engineering , electrical engineering , optics , physics , fabrication , medicine , meteorology , alternative medicine , pathology