
Platinum salicide process for BiCMOS applications.
Author(s) -
Khalid Sheergar
Publication year - 2018
Language(s) - Uncategorized
Resource type - Dissertations/theses
DOI - 10.22215/etd/1993-02525
Subject(s) - salicide , bicmos , computer science , reliability engineering , materials science , electrical engineering , engineering , optoelectronics , silicide , silicon , transistor , voltage