Open AccessNanomechanics of hard films on compliant substrates.
Author(s) -
E.D. Reedy,
John A. Emerson,
David F. Bahr,
N. R. Moody,
Xiao Wang Zhou,
Lucas Hales,
David P. Adams,
John D. Yeager,
Thao D. Nyugen,
Edmundo Corona,
Marian Kennedy,
Megan J. Cordill
Publication year - 2009
Language(s) - English
Resource type - Reports
DOI - 10.2172/993624
Subject(s) - materials science , microelectronics , composite material , thin film , indentation , nanoelectromechanical systems , substrate (aquarium) , nanomechanics , delamination (geology) , residual stress , bending , nanoindentation , microtechnology , ceramic , nanotechnology , nanoparticle , nanomedicine , paleontology , oceanography , geology , biology , subduction , atomic force microscopy , tectonics