Open AccessNanomechanics of hard films on compliant substrates.
Author(s) -
John A. Emerson,
David Bahr,
Neville Reid Moody,
Xiaowang Zhou,
Lucas Hales,
David Adams,
John D. Yeager,
Thao Nyugen,
Edmundo Corona,
Marian Kennedy,
Megan J. Cordill
Publication year - 2009
Language(s) - English
Resource type - Reports
DOI - 10.2172/993624
Subject(s) - materials science , microelectronics , composite material , thin film , indentation , nanoelectromechanical systems , substrate (aquarium) , delamination (geology) , residual stress , microtechnology , bending , nanoindentation , ceramic , nanomechanics , nanotechnology , fracture (geology) , nanoparticle , nanomedicine , paleontology , oceanography , geology , biology , subduction , atomic force microscopy , tectonics
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