Open AccessA NOVEL LOW THERMAL BUDGET THIN-FILM POLYSILICON FABRICATION PROCESS FOR LARGE-AREA, HIGH-THROUGHPUT SOLAR CELL PRODUCTION
Author(s) -
Yue Kuo
Publication year - 2010
Language(s) - English
Resource type - Reports
DOI - 10.2172/992272
Subject(s) - materials science , solar cell , crystallization , dopant , fabrication , x ray photoelectron spectroscopy , amorphous solid , thin film , silicon , substrate (aquarium) , raman spectroscopy , optoelectronics , annealing (glass) , amorphous silicon , layer (electronics) , nanotechnology , crystalline silicon , chemical engineering , doping , composite material , optics , crystallography , chemistry , medicine , alternative medicine , oceanography , physics , pathology , geology , engineering