Open AccessControlled fabrication of nanowire sensors.
Author(s) -
François Léonard
Publication year - 2007
Language(s) - English
Resource type - Reports
DOI - 10.2172/920825
Subject(s) - nanowire , materials science , field effect transistor , fabrication , nitrobenzene , silicon nanowires , silicon , transistor , physisorption , analyte , nanotechnology , analytical chemistry (journal) , optoelectronics , voltage , chemistry , chromatography , physics , medicine , biochemistry , alternative medicine , quantum mechanics , pathology , adsorption , catalysis
We present a simple top down approach based on nanoimprint lithography to create dense arrays of silicon nanowires over large areas. Metallic contacts to the nanowires and a bottom gate allow the operation of the array as a field-effect transistor with very large on/off ratios. When exposed to ammonia gas or cyclohexane solutions containing nitrobenzene or phenol, the threshold voltage of the field-effect transistor is shifted, a signature of charge transfer between the analytes and the nanowires. The threshold voltage shift is proportional to the Hammett parameter and the concentration of the nitrobenzene and phenol analytes. For the liquid analytes considered, we find binding energies of 400 meV, indicating strong physisorption. Such values of the binding energies are ideal for stable and reusable sensors