Low-loss LIGA-micromachined conductor-backed coplanar waveguide. | Zendy

Michael A. Forman | Zendy

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Low-loss LIGA-micromachined conductor-backed coplanar waveguide.

Author(s) -

Michael A. Forman

Publication year - 2004

Publication title -

osti oai (u.s. department of energy office of scientific and technical information)

Language(s) - English

Resource type - Reports

DOI - 10.2172/920817

Subject(s) - liga , coplanar waveguide , conductor , surface micromachining , microwave , materials science , insertion loss , attenuation , electrical conductor , optics , optoelectronics , fabrication , engineering , composite material , physics , telecommunications , medicine , alternative medicine , pathology

A mesoscale low-loss LIGA-micromachined conductor-backed coplanar waveguide is presented. The 517 {micro}m lines are the tallest uniplanar LIGA-fabricated microwave transmission lines to date, as well as the first to be constructed of copper rather than nickel. The conductor-backed micromachined CPW on quartz achieves a measured attenuation of 0.064 dB/cm at 15.5 GHz

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