Open AccessDevelopment of highly integrated magetically and electrostatically actuated micropumps : LDRD 64709 final report.
Author(s) -
Brian D. Sosnowchik,
Paul C. Galambos,
Jason Hendrix,
Andrew Zwolinski
Publication year - 2003
Publication title -
osti oai (u.s. department of energy office of scientific and technical information)
Language(s) - English
Resource type - Reports
DOI - 10.2172/918219
Subject(s) - actuator , fabrication , microelectromechanical systems , mechanical engineering , process (computing) , surface micromachining , engineering , torque , materials science , electrical engineering , computer science , optoelectronics , medicine , alternative medicine , physics , pathology , thermodynamics , operating system
The pump and actuator systems designed and built in the SUMMiT{trademark} process, Sandia's surface micromachining polysilicon MEMS (Micro-Electro-Mechanical Systems) fabrication technology, on the previous campus executive program LDRD (SAND2002-0704P) with FSU/FAMU (Florida State University/Florida Agricultural and Mechanical University) were characterized in this LDRD. These results demonstrated that the device would pump liquid against the flow resistance of a microfabricated channel, but the devices were determined to be underpowered for reliable pumping. As a result a new set of SUMMiT{trademark} pumps with actuators that generate greater torque will be designed and submitted for fabrication. In this document we will report details of dry actuator/pump assembly testing, wet actuator/pump testing, channel resistance characterization, and new pump/actuator design recommendations
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