Open AccessApplications of Synchrotron X-Rays in Microelectronics Industry Research
Author(s) -
Jean JordanSweet
Publication year - 2005
Language(s) - English
Resource type - Reports
DOI - 10.2172/839729
Subject(s) - beamline , microelectronics , ibm , synchrotron , diffraction , engineering physics , optics , materials science , computer science , engineering , nanotechnology , physics , beam (structure)
Accelerating Research
Robert Robinson Avenue,
Oxford Science Park, Oxford
OX4 4GP, United Kingdom
Address
John Eccles HouseRobert Robinson Avenue,
Oxford Science Park, Oxford
OX4 4GP, United Kingdom