Open AccessAn energy efficiency guide for use in cleanroom programming
Author(s) -
Bill Tschudi,
Tengfang Xu,
Dale Sartor
Publication year - 2001
Publication title -
lawrence berkeley national laboratory
Language(s) - English
Resource type - Reports
DOI - 10.2172/837786
Subject(s) - cleanroom , efficient energy use , computer science , energy (signal processing) , engineering , manufacturing engineering , process engineering , nanotechnology , electrical engineering , materials science , physics , quantum mechanics
This guide was developed to provide ideas for considering energy efficiency in the early stages of a cleanroom design project. Use of this guide will facilitate selection of design features that will improve energy efficiency in cleanrooms. Cleanroom owners and designers can use the guide to focus on energy intensive items in the design of a cleanroom facility
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