Open AccessHigh Gain, Fast Scan, Broad Spectrum, Parallel Beam Wavelength Dispersive X-ray Spectrometer for SEM
Author(s) -
David B. O'Hara,
Eric Lochmer
Publication year - 2003
Language(s) - English
Resource type - Reports
DOI - 10.2172/814961
Subject(s) - optics , spectrometer , collimated light , parallax , detector , resolution (logic) , wavelength , physics , reflection (computer programming) , scanning electron microscope , beam (structure) , materials science , computer science , laser , astronomy , artificial intelligence , programming language
Parallax Research, Inc. proposes to produce a new type of x-ray spectrometer for use with Scanning Electron Microscopy (SEM) that would have the energy resolution of WDS and the ease of use of EDS with sufficient gain for lower energies that it can be used at low beam currents as is EDS. Parallax proposes to do this by development of new multiple reflection x-ray collimation optics, new diffractor technology, new detector technology and new scan algorithms