Open AccessSupercritical carbon dioxide extraction of porogens for the preparation of ultralow-dielectric-constant films
Author(s) -
Michael F. Toney
Publication year - 2003
Language(s) - English
Resource type - Reports
DOI - 10.2172/813355
Subject(s) - materials science , supercritical carbon dioxide , dielectric , nanoporous , fourier transform infrared spectroscopy , supercritical fluid extraction , extraction (chemistry) , supercritical fluid , analytical chemistry (journal) , chemical engineering , thermal decomposition , supercritical drying , small angle x ray scattering , aerogel , composite material , scattering , chromatography , organic chemistry , nanotechnology , optics , chemistry , physics , optoelectronics , engineering
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