Open AccessCoherence techniques at extreme ultraviolet wavelengths
Author(s) -
Chang Chang
Publication year - 2002
Language(s) - Uncategorized
Resource type - Reports
DOI - 10.2172/810486
Subject(s) - extreme ultraviolet lithography , undulator , optics , extreme ultraviolet , beamline , physics , synchrotron radiation , coherence (philosophical gambling strategy) , coherence time , coherence length , radiation , wavelength , laser , beam (structure) , superconductivity , quantum mechanics