Open AccessSilicon/Pyrex Planar Microbattery A Silicon Process-Compatible Micro-Power Source
Author(s) -
Stanley H. Kravitz,
David Ingersoll,
Nelson S. Bell,
Sherry Zmuda,
R. J. Shul,
Brian D. Wroblewski
Publication year - 2003
Publication title -
osti oai (u.s. department of energy office of scientific and technical information)
Language(s) - English
Resource type - Reports
DOI - 10.2172/808609
Subject(s) - wafer , materials science , silicon , anode , battery (electricity) , cathode , fabrication , reactive ion etching , anodic bonding , electrolyte , lithium (medication) , optoelectronics , lithium ion battery , etching (microfabrication) , deep reactive ion etching , nanotechnology , electrode , electrical engineering , chemistry , power (physics) , engineering , quantum mechanics , physics , alternative medicine , endocrinology , pathology , layer (electronics) , medicine
The design, fabrication, and performance of a planar microbattery made from a silicon wafer with a bonded lid are presented. The battery is designed with two compartments, separated by four columns of micro-posts. These posts are 3 or 5 micrometers in diameter. The posts permit transport of liquid electrolyte, but stop particles of battery material from each compartment from mixing. The anode and cathode battery compartments, the posts, fill holes, and conductive vias are all made using high-aspect-ratio reactive ion (Bosch) etching. After the silicon wafer is completed, it is anodically bonded or adhesive bonded to a Pyrex{reg_sign} wafer lid. The battery materials are made from micro-disperse particles that are 3-5 micrometers in diameter. The lithium-ion chemistry is microcarbon mesobeads and lithium cobalt oxide. The battery capacity is 1.83 micro-amp-hrs/cm{sup 2} at a discharge rate of 25 microamps
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