Open AccessDesign of Surface Micromachined Compliant MEMS
Author(s) -
Joe Anthony Bradley
Publication year - 2002
Language(s) - English
Resource type - Reports
DOI - 10.2172/804164
Subject(s) - microelectromechanical systems , surface micromachining , compliant mechanism , flexibility (engineering) , bulk micromachining , process (computing) , cantilever , fabrication , mechanical engineering , materials science , computer science , engineering , electronic engineering , nanotechnology , aerospace engineering , finite element method , structural engineering , medicine , statistics , alternative medicine , mathematics , pathology , operating system