The fabrication of Stainless Stell Parts for MEMS

A micro-molding process was used to fabricate parts in the 0.1 to 10 mm size range from a stainless steel nano-powder. The two types of molds used were both produced from parts fabricated using the LIGA process so that they had precise dimensional tolerance and straight sidewalls. Rigid PMMA molds were made by injection molding and flexible silicone rubber molds were made by casting. Mold filling was accomplished by mixing the powder with epoxy to form a putty-like material that was then pressed into the mold cavities and allowed to cure. After pyrolysis of the epoxy, the parts were sintered in forming gas. The densification kinetics were measured in situ using a video system. Full densification was achieved after 1 hour at 1350 C. The microstructure of the sintered parts was examined using the SEM. The hardness, dimensional tolerance and surface roughness of the sintered parts were also measured