Open AccessChemical vapor deposition growth. Quarterly report No. 1
Author(s) -
R. P. Ruth,
H. M. Manasevit,
J. L. Kenty,
L. A. Moudy,
W. I. Simpson,
Ji-Hun Yang
Publication year - 1976
Publication title -
osti oai (u.s. department of energy office of scientific and technical information)
Language(s) - Uncategorized
Resource type - Reports
DOI - 10.2172/7363808
Subject(s) - bellows , deposition (geology) , chemical vapor deposition , solenoid , quarter (canadian coin) , flow (mathematics) , environmental science , materials science , nuclear engineering , process engineering , engineering , mechanical engineering , nanotechnology , mechanics , physics , geology , metallurgy , history , paleontology , archaeology , sediment
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