Open AccessProcess feasibility study in support of Silicon Material Task I. Quarterly technical progress report (II)
Author(s) -
Carl L. Yaws
Publication year - 1976
Publication title -
osti oai (u.s. department of energy office of scientific and technical information)
Language(s) - English
Resource type - Reports
DOI - 10.2172/7357724
Subject(s) - silicon , silane , silicon tetrachloride , silicon carbide , analytical chemistry (journal) , chemistry , materials science , waste management , engineering physics , engineering , metallurgy , chemical engineering , environmental chemistry
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