Open AccessEquipment variables and deposition conditions affecting the plasma oxidation of pyrocarbon coatings on HTGR fuel particles
Author(s) -
J. P. Mathers,
V.J. Tennery,
E.S. Bomar
Publication year - 1976
Language(s) - English
Resource type - Reports
DOI - 10.2172/7353801
Subject(s) - etching (microfabrication) , coating , materials science , deposition (geology) , plasma etching , plasma , chemical engineering , composite material , analytical chemistry (journal) , chemistry , layer (electronics) , organic chemistry , paleontology , physics , quantum mechanics , sediment , engineering , biology